SUBSTRATE TREATMENT DEVICE, AND TREATING LIQUID CONCENTRATION MEASURING INSTRUMENT USED THEREFOR

PROBLEM TO BE SOLVED: To provide a device capable of measuring accurately a concentration of a treating liquid flowing in a treating liquid supply passage, and capable of preparing the prescribed concentration of treating liquid in a treating liquid supply part. SOLUTION: An electromagnetic induction type conductivity sensor 54 is arranged in a midway of a liquid supply pipe 18 for supplying the treating liquid into a treating vessel 10, and a detecting part 58 of a temperature measuring instrument is arranged in an upstream of the conductivity sensor to measure a temperature of the treating liquid flowing in the treating liquid supply pipe. The concentration of the treating liquid found based on a conductivity measured by the conductivity sensor is calibrated by a computing part 56, based on the temperature of the treating liquid measured by the temperature measuring instrument. COPYRIGHT: (C)2005,JPO&NCIPI