ELECTROABSORPTION OPTICAL MODULATION MODULE HAVING MONOLITHICALLY INTEGRATED PHOTODETECTOR AND METHOD OF MANUFACTURING THE SAME

PROBLEM TO BE SOLVED: To provide an electroabsorption optical modulation module having a monolithically integrated photodetector whereby the optical axes of the photodetector and a distributed feedback laser are readily aligned, a malfunction caused by an ambient environment is prevented in the photodetector, and electrical isolation is readily obtained between the photodetector and the distributed feedback laser. SOLUTION: The module includes a distributed feedback laser 210 which has a lattice 212 for oscillating and outputs the oscillated light through first and second terminals, an electroabsorption optical modulator 220 for modulating first light outputted through the first terminal of the distributed feedback laser, a photodetector 250 which is formed on a semiconductor substrate 201 so as to face the second terminal of the distributed feedback laser, so that second light outputted through the second terminal is detected, and an inner window 260a which is provided between the distributed feedback laser and the photodetector, so that the intensity of the second light is reduced and the distributed feedback laser and the photodetector are electrically isolated from each other. COPYRIGHT: (C)2005,JPO&NCIPI