MULTILAYER SUBSTRATE AND ITS PRODUCTION PROCESS

PROBLEM TO BE SOLVED: To provide a multilayer substrate exhibiting excellent dimensional accuracy wherein contraction in the plane direction is close to zero and variation in contraction is suppressed, and to provide its production process. SOLUTION: The multilayer substrate comprises at least two kinds of insulation layer of crystallized glass ceramics laid in layer wherein the crystallization point of crystallized glass contained in a first insulation layer is lower than the softening point of crystallized glass contained in a second insulation layer and difference of thermal expansion coefficient between the first and second insulation layers is preferably 2×10-6/°C or less. COPYRIGHT: (C)2005,JPO&NCIPI