TRANSDUCER LEVEL MICROACTUATOR FOR DISK DRIVE SYSTEM AND IMPROVED METHOD OF FABRICATION THEREFOR

PROBLEM TO BE SOLVED: To provide a transducer-level microactuator which is made by a substrate material of a standard Al2O3TiC or other carbon bases, strong and having almost no possibility of damage during the use and also easily to be fabricated. SOLUTION: A slider includes the microactuator for positioning a transducer portion. The transducer body is spaced from a trailing edge of the slider body and includes at least one transducer element. Flexure bodies (54a-54d) extend from the trailing edge of the slider body and include a 1st anchor point connected to the slider body and a 2nd anchor point connected to the transducer body. A basecoat layer is deposited on the trailing edge of the slider body and almost surrounds the flexure body wherein a gap separates the flexure body from the basecoat. A 1st actuation means is formed on the basecoat, and a 2nd actuation means is formed on the transducer body adjacent the slider body. COPYRIGHT: (C)2005,JPO&NCIPI