PIEZOELECTRIC ACTUATOR ELEMENT AND MANUFACTURING METHOD THEREFOR

PIEZOELECTRIC ACTUATOR ELEMENT AND MANUFACTURING METHOD THEREFOR

PROBLEM TO BE SOLVED: To solve the following problem in conjunction with increase in the density of magnetic disk units: a piezoelectric actuator element comprises a pair of separated units, and the respective ends are coupled with each other by a flexible resin layer; the left and right piezoelectr...

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Hauptverfasser: UCHIYAMA HIROICHI, OGAWA HIROKO
Format: Patent
Sprache:eng
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CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
GENERATION
INFORMATION STORAGE
INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER
PHYSICS
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creator UCHIYAMA HIROICHI
OGAWA HIROKO
description PROBLEM TO BE SOLVED: To solve the following problem in conjunction with increase in the density of magnetic disk units: a piezoelectric actuator element comprises a pair of separated units, and the respective ends are coupled with each other by a flexible resin layer; the left and right piezoelectric thin film units deform and the resonance characteristics are degraded; and the operation of the magnetic disk unit is influenced. SOLUTION: One ends of a first piezoelectric element unit 10a and a second piezoelectric element unit 10b separated to left and right are coupled with each other by a reinforcing member (19 or 30c), and a beam piece is provided. Thus, deformation in the first piezoelectric element unit 10a and the second piezoelectric element unit 10b can be suppressed. As a result, the piezoelectric actuator element 10 can be uniformly bonded to a flexure 7 in a head support mechanism 100, and stable resonance characteristics can be obtained. Further, breakage due to deformation can be prevented, and high reliability can be ensured. COPYRIGHT: (C)2005,JPO&NCIPI
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SOLUTION: One ends of a first piezoelectric element unit 10a and a second piezoelectric element unit 10b separated to left and right are coupled with each other by a reinforcing member (19 or 30c), and a beam piece is provided. Thus, deformation in the first piezoelectric element unit 10a and the second piezoelectric element unit 10b can be suppressed. As a result, the piezoelectric actuator element 10 can be uniformly bonded to a flexure 7 in a head support mechanism 100, and stable resonance characteristics can be obtained. Further, breakage due to deformation can be prevented, and high reliability can be ensured. 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SOLUTION: One ends of a first piezoelectric element unit 10a and a second piezoelectric element unit 10b separated to left and right are coupled with each other by a reinforcing member (19 or 30c), and a beam piece is provided. Thus, deformation in the first piezoelectric element unit 10a and the second piezoelectric element unit 10b can be suppressed. As a result, the piezoelectric actuator element 10 can be uniformly bonded to a flexure 7 in a head support mechanism 100, and stable resonance characteristics can be obtained. Further, breakage due to deformation can be prevented, and high reliability can be ensured. 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subjects CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
GENERATION
INFORMATION STORAGE
INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER
PHYSICS
title PIEZOELECTRIC ACTUATOR ELEMENT AND MANUFACTURING METHOD THEREFOR
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