PIEZOELECTRIC ACTUATOR ELEMENT AND MANUFACTURING METHOD THEREFOR

PROBLEM TO BE SOLVED: To solve the following problem in conjunction with increase in the density of magnetic disk units: a piezoelectric actuator element comprises a pair of separated units, and the respective ends are coupled with each other by a flexible resin layer; the left and right piezoelectric thin film units deform and the resonance characteristics are degraded; and the operation of the magnetic disk unit is influenced. SOLUTION: One ends of a first piezoelectric element unit 10a and a second piezoelectric element unit 10b separated to left and right are coupled with each other by a reinforcing member (19 or 30c), and a beam piece is provided. Thus, deformation in the first piezoelectric element unit 10a and the second piezoelectric element unit 10b can be suppressed. As a result, the piezoelectric actuator element 10 can be uniformly bonded to a flexure 7 in a head support mechanism 100, and stable resonance characteristics can be obtained. Further, breakage due to deformation can be prevented, and high reliability can be ensured. COPYRIGHT: (C)2005,JPO&NCIPI