CAPACITOR AND ITS MANUFACTURING METHOD

PROBLEM TO BE SOLVED: To provide a capacitor which is equipped with a dielectric film having a hafnium oxide and an aluminum oxide, can obtain a characteristic of a high dielectric breakdown voltage in a high voltage applied area, and can prevent a leakage current from increasing caused by the following heat treatment process after forming an upper electrode, and to provide its manufacturing method. SOLUTION: The capacitor is laminated with a lower electrode 21, a mixed dielectric film 22, and an upper electrode 23 in that order, and is equipped with the mixed dielectric film where the hafnium oxide 22B and the aluminum oxide 22A are mixed, in a portion where the mixed dielectric film 22 is adjacent to the upper electrode 23 or the lower electrode 21. COPYRIGHT: (C)2005,JPO&NCIPI