CIRCUIT INSPECTION DEVICE

PROBLEM TO BE SOLVED: To enhance inspection precision for an inspection-objective circuit. SOLUTION: In the present invention, a clock data output from the inspection-objective circuit is read in to detect timing of leading-up or tailing in a waveform, a processed result data output synchronizedly with the clock data from the inspection-objective circuit is read in, the quality of the inspection-objective circuit is determined based on a data condition of the processed result data detected using the timing of the clock data as a reference, the data condition is thereby detected under the same condition all the time using the timing of the clock data as the reference, even when delay times of the processed result data are dispersed by dispersion in production precision of the inspection-objective circuit, and an inspection condition is avoided surely from being affected by the delay times of the processed result data, so as to enhance the inspection precision for the inspection-objective circuit. COPYRIGHT: (C)2005,JPO&NCIPI