ETCHING METHOD FOR FLEXIBLE BOARD

PROBLEM TO BE SOLVED: To provide an etching method where an etching liquid is uniformly efficiently sprayed on a flexible board so as to perform etching without leaving a fatigued etching liquid, and the etching condition in the central part and the peripheral part in a tape is made uniform. SOLUTIO...

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Hauptverfasser:	ENDO HIROHISA, TAKAHAGI SHIGEJI, FUJIMOTO KENICHIRO, SUGIMOTO HIROSHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS METALLURGY MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLICMATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASSC23 AND AT LEAST ONEPROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25 NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE PRINTED CIRCUITS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an etching method where an etching liquid is uniformly efficiently sprayed on a flexible board so as to perform etching without leaving a fatigued etching liquid, and the etching condition in the central part and the peripheral part in a tape is made uniform. SOLUTION: In the etching method where an etching liquid is sprayed on a beltlike flexible substrate 1 carried so as to be guided and supported by rolls 3, the carrying height of the flexible substrate 1 under etching is set to have ruggedness depending on the height of each roll 3. COPYRIGHT: (C)2005,JPO&NCIPI