SURFACE ANALYZER

PROBLEM TO BE SOLVED: To surely measure an element amount even in a high background. SOLUTION: This surface analyzer for detecting a secondary charged particle generated by irradiating a sample surface with a primary beam is provided with an energy analyzer for developing the secondary charged parti...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: IKEO NOBUYUKI
Format: Patent
Sprache:eng
Schlagworte:
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