SURFACE ANALYZER

SURFACE ANALYZER

PROBLEM TO BE SOLVED: To surely measure an element amount even in a high background. SOLUTION: This surface analyzer for detecting a secondary charged particle generated by irradiating a sample surface with a primary beam is provided with an energy analyzer for developing the secondary charged parti...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
1. Verfasser: IKEO NOBUYUKI
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To surely measure an element amount even in a high background. SOLUTION: This surface analyzer for detecting a secondary charged particle generated by irradiating a sample surface with a primary beam is provided with an energy analyzer for developing the secondary charged particle in response to energy, a multichannel detecting means for detecting the secondary charged particle developed by the energy analyzer as an energy spectrum data, a differential computation means for differential-computing the energy spectrum data, and an element amount computing means for computing the prescribed element amount on the sample surface with the generated secondary charged particle, based on the intensity of a differential-computed value. COPYRIGHT: (C)2005,JPO&NCIPI