DEVICE FOR MEASURING FLOW RATE

PROBLEM TO BE SOLVED: To provide a device for measuring flow rate, capable of preventing breakage of a sensor element due to flying particles flying in random directions and ensured with high measurement precision. SOLUTION: The flow rate measuring device 100 comprises the sensor element 1 for measuring the flow rate of the measuring fluid, while exposing the upper surface to the measuring fluid, and a support plate 2c for mounting the sensor element 1, wherein the sensor element 1 is mounted on the support plate 2c via the shock absorber 4. Thereby, the impact of collision of the particles is alleviated by the shock absorber 4, even if the particles flying in random directions collide against the sensor element 1. Consequently, the sensor element 1 is prevented from being damaged or broken. In the flow rate measuring device 100, the sensor element 1 remains exposed to the measuring fluid, therefore, the sensitivity of the sensor is satisfactory and high measurement precision is ensured. COPYRIGHT: (C)2005,JPO&NCIPI