SUPPLY CONTROL SYSTEM AND METHOD THEREFOR, PROGRAM, AND INFORMATION STORAGE

PROBLEM TO BE SOLVED: To provide a supply control system, or the like for appropriately controlling the supply of lots and masks to a photo device. SOLUTION: A supply control unit 100 includes lot management data 142 for managing a plurality of lots, reticle management data 144 for managing a plural...

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Bibliographische Detailangaben
Hauptverfasser:	TADANO AKIRA, SUGAWARA YUKI, KATO HIFUMI
Format:	Patent
Sprache:	eng
Schlagworte:	ACCESSORIES THEREFOR APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USINGWAVES OTHER THAN OPTICAL WAVES APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FORPROJECTING OR VIEWING THEM BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS HOLOGRAPHY PHOTOGRAPHY PHYSICS SEMICONDUCTOR DEVICES TECHNICAL SUBJECTS COVERED BY FORMER USPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ARTCOLLECTIONS [XRACs] AND DIGESTS
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a supply control system, or the like for appropriately controlling the supply of lots and masks to a photo device. SOLUTION: A supply control unit 100 includes lot management data 142 for managing a plurality of lots, reticle management data 144 for managing a plurality of masks; a storage 140 for storing inline photo device management data 146 for managing the photo device; an updating section 130 for updating the data; a control information generator 120 for generating lot supply control information for controlling the supply of lots and mask supply control information for controlling the supply of masks, based on the lot management data 142 and the reticle management data 144; and a communication section 110 for transmitting lot supply control information to a lot feeder for supplying lots to the photo device, transmitting mask supply control information to the mask feeder for supplying masks to the photo device, and receiving notification information for indicating the current position of lots or masks from the lot feeder, mask feeder, or photo device. COPYRIGHT: (C)2005,JPO&NCIPI