SINGLEMODE VERTICAL RESONATOR SURFACE LUMINESCENCE LASER AND ITS MANUFACTURING METHOD

PROBLEM TO BE SOLVED: To provide an improved single-mode resonator surface luminescence laser which supplies larger current filling aperture and higher singlemode output light power, and its manufacturing method. SOLUTION: The vertical resonator surface luminescence laser (VCSEL) 10, which generates single-mode laser light, comprises a luminescence surface 30 and a monolithic longitudinal stack structure body. The stack structure body has a first and a second mirrors 14, 16 which have light reflectances R1, R2with respect to operating wavelength light respectively, further one side of R1and R2is greater than 99.9%, and another side is made smaller than 99.7%. In a space between the first and the second mirrors 14, 16, a cavity region 12, which has an active light generation region 19 and a cavity extension region 26, is formed. The stack structure body further has a current confining region 28 in which ion is implanted, and peak implantation concentration portion is estranged by a distance longer than 0.5μm in longitudinal direction from the cavity region 12. COPYRIGHT: (C)2005,JPO&NCIPI