MAPPING MEASUREMENT APPARATUS

PROBLEM TO BE SOLVED: To provide a mapping measurement apparatus for implementing mapping measurement using a simple apparatus constitution. SOLUTION: The mapping measurement apparatus 10 is provided with a light irradiating means 12 for irradiating a sample with a light and a light detecting means...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: TSUKADA HIROSHI, KOSHOBU JUN, SOGA YOSHIAKI
Format: Patent
Sprache:eng
Schlagworte:
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