MAPPING MEASUREMENT APPARATUS

PROBLEM TO BE SOLVED: To provide a mapping measurement apparatus for implementing mapping measurement using a simple apparatus constitution. SOLUTION: The mapping measurement apparatus 10 is provided with a light irradiating means 12 for irradiating a sample with a light and a light detecting means 14 for detecting a light reflected from or transmitted through the sample via an aperture 16, limits the light detected by the light detecting means 14 to the light from a predetermined measured region by leading the light reflected from or transmitted through the sample to the aperture 16, and implements the mapping measurement within a predetermined range of the sample by changing and measuring the measured region. A detecting scan mirror 18 is provided on an optical path from the sample 28 to the aperture 16, and has a reflecting face with a movable orientation. Since the reflecting face of the scan mirror 18 is variable in an incident direction of the reflected light or the transmitted light, the measured region detected by the light detecting means 14 can be changed. COPYRIGHT: (C)2005,JPO&NCIPI