THERMALLY SPRAYED FILM DEPOSITING METHOD, AND COMPOSITE MATERIAL MANUFACTURING METHOD

PROBLEM TO BE SOLVED: To provide a protective film depositing method capable of preventing occurrence of micro-cracks on the surface of a ceramic material and preventing a plasma-resistant protective film from being peeled, and a composite material manufacturing method. SOLUTION: The thermally spray...

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Hauptverfasser: KOBAYASHI YOSHIAKI, ICHIJIMA MASAHIKO
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creator KOBAYASHI YOSHIAKI
ICHIJIMA MASAHIKO
description PROBLEM TO BE SOLVED: To provide a protective film depositing method capable of preventing occurrence of micro-cracks on the surface of a ceramic material and preventing a plasma-resistant protective film from being peeled, and a composite material manufacturing method. SOLUTION: The thermally sprayed film depositing method comprises a roughening step of chemically roughening the surface of a brittle material and a thermal spraying step of thermal-spraying a protective film on the surface of the brittle material, and in the roughening step, the arithmetic mean roughness (Ra) of the roughened surface of the brittle material is set to 1-10. When a ceramic sintered compact is used for the brittle material, acid etching solution such as sulfuric acid or phosphoric acid can be used. Further, when quartz is used for the brittle material, chemical frost treatment agent can be used. COPYRIGHT: (C)2005,JPO&NCIPI
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SOLUTION: The thermally sprayed film depositing method comprises a roughening step of chemically roughening the surface of a brittle material and a thermal spraying step of thermal-spraying a protective film on the surface of the brittle material, and in the roughening step, the arithmetic mean roughness (Ra) of the roughened surface of the brittle material is set to 1-10. When a ceramic sintered compact is used for the brittle material, acid etching solution such as sulfuric acid or phosphoric acid can be used. Further, when quartz is used for the brittle material, chemical frost treatment agent can be used. COPYRIGHT: (C)2005,JPO&amp;NCIPI</abstract><edition>7</edition><oa>free_for_read</oa></addata></record>
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subjects ARTIFICIAL STONE
BASIC ELECTRIC ELEMENTS
CEMENTS
CERAMICS
CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUSENAMELS
CHEMICAL SURFACE TREATMENT
CHEMISTRY
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING MATERIAL WITH METALLIC MATERIAL
COATING METALLIC MATERIAL
COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS
CONCRETE
DIFFUSION TREATMENT OF METALLIC MATERIAL
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
GLASS
INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL
JOINING GLASS TO GLASS OR OTHER MATERIALS
LIME, MAGNESIA
METALLURGY
MINERAL OR SLAG WOOL
REFRACTORIES
SEMICONDUCTOR DEVICES
SLAG
SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS,MINERALS OR SLAGS
SURFACE TREATMENT OF GLASS
SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
TREATMENT OF NATURAL STONE
title THERMALLY SPRAYED FILM DEPOSITING METHOD, AND COMPOSITE MATERIAL MANUFACTURING METHOD
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