THERMALLY SPRAYED FILM DEPOSITING METHOD, AND COMPOSITE MATERIAL MANUFACTURING METHOD

PROBLEM TO BE SOLVED: To provide a protective film depositing method capable of preventing occurrence of micro-cracks on the surface of a ceramic material and preventing a plasma-resistant protective film from being peeled, and a composite material manufacturing method. SOLUTION: The thermally spray...

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Bibliographische Detailangaben
Hauptverfasser:	KOBAYASHI YOSHIAKI, ICHIJIMA MASAHIKO
Format:	Patent
Sprache:	eng
Schlagworte:	ARTIFICIAL STONE BASIC ELECTRIC ELEMENTS CEMENTS CERAMICS CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUSENAMELS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS CONCRETE DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GLASS INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL JOINING GLASS TO GLASS OR OTHER MATERIALS LIME, MAGNESIA METALLURGY MINERAL OR SLAG WOOL REFRACTORIES SEMICONDUCTOR DEVICES SLAG SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS,MINERALS OR SLAGS SURFACE TREATMENT OF GLASS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TREATMENT OF NATURAL STONE
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a protective film depositing method capable of preventing occurrence of micro-cracks on the surface of a ceramic material and preventing a plasma-resistant protective film from being peeled, and a composite material manufacturing method. SOLUTION: The thermally sprayed film depositing method comprises a roughening step of chemically roughening the surface of a brittle material and a thermal spraying step of thermal-spraying a protective film on the surface of the brittle material, and in the roughening step, the arithmetic mean roughness (Ra) of the roughened surface of the brittle material is set to 1-10. When a ceramic sintered compact is used for the brittle material, acid etching solution such as sulfuric acid or phosphoric acid can be used. Further, when quartz is used for the brittle material, chemical frost treatment agent can be used. COPYRIGHT: (C)2005,JPO&NCIPI