OPERATION METHOD OF LITHOGRAPHY SYSTEM OR LITHOGRAPHY TREATMENT CELL, LITHOGRAPHY SYSTEM, AND LITHOGRAPHY TREATMENT CELL

PROBLEM TO BE SOLVED: To provide an operation method in which scheduling for determining an order of many tasks that are performed using various functions in a machine involving lithography is corrected in a restorable manner when an expected situation occurs during operation. SOLUTION: In the opera...

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Hauptverfasser:	ROODA JACOBUS E, STOETS MICHIEL A R, VAN DEN NIEUWELAAR NORBERTUS JOSEPHUS MARTINUS, ONVLEE JOHANNES, DUMONT ROBERT J, VAN LIEROP HENRICUS PETRUS JOHANNES, KOENEN WILLEM HERMAN GERTRUDA ANNA
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY FUNCTIONAL ELEMENTS OF SUCH SYSTEMS GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS HOLOGRAPHY MATERIALS THEREFOR MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS REGULATING SEMICONDUCTOR DEVICES TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an operation method in which scheduling for determining an order of many tasks that are performed using various functions in a machine involving lithography is corrected in a restorable manner when an expected situation occurs during operation. SOLUTION: In the operation method of the machine, a state resistor SR indicating a state of the machine and a database TDB of tasks executable in the machine are maintained, possible task orders are created based on conditions before and after the tasks on the state of the system (rather than a priority relation), an order confirming given start and end states of the machine is selected from the created orders. According to the method, the order of the tasks executable in the machine can be quickly created, and an optimum order can be quickly found, in addition, automatic restoration from an exception is possible. COPYRIGHT: (C)2005,JPO&NCIPI