CO2 SNOW JETTING DEVICE AND CO2 SNOW JETTING METHOD

PROBLEM TO BE SOLVED: To provide a CO2snow jetting device and method reducing the influence of a system loss change caused by a temperature change. SOLUTION: In this CO2snow jetting device for expanding liquid CO2to produce CO2snow and allowing assist gas to join the CO2snow to jet the CO2snow, a sw...

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Bibliographische Detailangaben
Hauptverfasser:	KONDO YUMITO, KUDO TAKUJI
Format:	Patent
Sprache:	eng
Schlagworte:	ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL BASIC ELECTRIC ELEMENTS CLEANING CLEANING IN GENERAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GRINDING PERFORMING OPERATIONS POLISHING PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a CO2snow jetting device and method reducing the influence of a system loss change caused by a temperature change. SOLUTION: In this CO2snow jetting device for expanding liquid CO2to produce CO2snow and allowing assist gas to join the CO2snow to jet the CO2snow, a swirling means is provided for swirling assist gas to form the swirling flow of assist gas around the CO2snow in an expansion chamber at a confluence part, and a pressure measuring means is provided for measuring pressure near the wall part of the expansion chamber to control the supply pressure of the assist gas based on measured pressure signals. Further, liquid CO2constant flow control is performed to control the supply pressure of the assist gas. COPYRIGHT: (C)2005,JPO&NCIPI