MOBILE AND TRANSPORTABLE TYPE ELECTROSTATIC SUBSTRATE HOLDER

PROBLEM TO BE SOLVED: To provide an electrostatic substrate holder which reduces dramatically loss of yield of substrates by holding the substrate when processing or treating the substrates similar to a silicon wafer in the case of manufacturing semiconductors. SOLUTION: The electrostatic substrate...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	BUSSE KARL-HERMANN, KEILBACH STEFFEN
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MACHINE TOOLS MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS SEMICONDUCTOR DEVICES TRANSPORTING
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