MOBILE AND TRANSPORTABLE TYPE ELECTROSTATIC SUBSTRATE HOLDER

PROBLEM TO BE SOLVED: To provide an electrostatic substrate holder which reduces dramatically loss of yield of substrates by holding the substrate when processing or treating the substrates similar to a silicon wafer in the case of manufacturing semiconductors. SOLUTION: The electrostatic substrate...

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Bibliographische Detailangaben
Hauptverfasser:	BUSSE KARL-HERMANN, KEILBACH STEFFEN
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MACHINE TOOLS MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS SEMICONDUCTOR DEVICES TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an electrostatic substrate holder which reduces dramatically loss of yield of substrates by holding the substrate when processing or treating the substrates similar to a silicon wafer in the case of manufacturing semiconductors. SOLUTION: The electrostatic substrate holder (2)is formed as a mobile and transportable holder, and its diameter and/or the lengths of its sides are made larger than the diameter of a transported substrate (1) and/or the lengths of the sides of the substrate (1), locally, in places, or wholly. The substrate (1) is attached to a fixed type accepting portion (6) via the mobile electrostatic substrate holder. COPYRIGHT: (C)2005,JPO&NCIPI