APPARATUS AND METHOD FOR MONITORING CHEMICAL SUBSTANCE

PROBLEM TO BE SOLVED: To provide a chemical substance monitoring apparatus, and to provide a chemical substance monitoring method capable of high-precision analysis. SOLUTION: The chemical substance monitoring apparatus comprises an ion source part 3 for generating ions of a substance to be measured in a sample gas, inlet piping 2 for letting the sample gas in the ion source part, a mass spectrometry part 4 for performing mass spectrometry on the ions, and piping for letting dry air for diluting the sample gas in the inlet piping. The dry air is let in the inlet piping, in such a way that the moisture concentration in the sample gas let in the ion source part may be of 1% or lower to detect the substance to be measured. Reduction in sensitivity due to moisture can be prevented, by controlling the moisture concentration and improve quantitative analysis precision. COPYRIGHT: (C)2005,JPO&NCIPI