COLLET CHUCK AND SEMICONDUCTOR MANUFACTURING DEVICE USING IT
PROBLEM TO BE SOLVED: To provide a collet chuck which prevents a semiconductor chip from being brought back after carried and misregistration in mounting, and to provide a semiconductor manufacturing device using it. SOLUTION: In a collet chuck 1 wherein a vacuum source is connected to one opening o...
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Patent |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a collet chuck which prevents a semiconductor chip from being brought back after carried and misregistration in mounting, and to provide a semiconductor manufacturing device using it. SOLUTION: In a collet chuck 1 wherein a vacuum source is connected to one opening of an elastic body with a suction hole 4 which is opened in both edge faces and a semiconductor chip 5 is sucked and carried by the other opening, the hardness of a collet tip part 3 in contact with the semiconductor chip is higher than the hardness of a collet body 2. COPYRIGHT: (C)2005,JPO&NCIPI |
|---|