SURFACE ACOUSTIC WAVE ELEMENT
PROBLEM TO BE SOLVED: To increase a reflection coefficient in an interdigital electrode so as to suppress an undesired ripple in a surface acoustic wave element in which the interdigital electrode and an insulating film are formed on a piezoelectric substrate. SOLUTION: In the surface acoustic wave...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To increase a reflection coefficient in an interdigital electrode so as to suppress an undesired ripple in a surface acoustic wave element in which the interdigital electrode and an insulating film are formed on a piezoelectric substrate. SOLUTION: In the surface acoustic wave element 1, the interdigital electrode 3 is formed on the piezoelectric substrate 2, the piezoelectric substrate 2 has a first area formed with a conductive film constituting an electrode and a second area formed with no conductive film, an insulating film 6 is formed in the second area at least, and a mass added film 7 is formed at the area formed with an electrode finger at least in the first area or in the second area. COPYRIGHT: (C)2005,JPO&NCIPI |
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