VALVE FOR VACUUM PRESSURE REGULATION

PROBLEM TO BE SOLVED: To provide a valve for vacuum pressure regulation of simple constitution capable of improving the rate-of-flow characteristics when a vacuum chamber is to be decompressed. SOLUTION: The valve for vacuum pressure regulation is composed of a large-sized main valve 1A having two m...

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1. Verfasser: KAJITANI MASAO
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a valve for vacuum pressure regulation of simple constitution capable of improving the rate-of-flow characteristics when a vacuum chamber is to be decompressed. SOLUTION: The valve for vacuum pressure regulation is composed of a large-sized main valve 1A having two main ports 11 and 12 connected with the vacuum chamber 7 and a vacuum pump 8, a main seat 14 in the passage tying together the main ports 11 and 12, a main valve member 15 to open and close the main seat 14, a main valve body 4 having a main valve shaft 20 extending from the main valve member 15, and a main valve operation part 5 to open and close the main valve member 15 through the main valve shaft 20, and a small-sized auxiliary valve 2A having a similar constitution to the above. The auxiliary valve 2A is attached to the outer side face of the housing 10 of the main valve 1A. COPYRIGHT: (C)2005,JPO&NCIPI