CROSSLINKED POLYMER THIN FILM AND METHOD FOR FORMING THE SAME

PROBLEM TO BE SOLVED: To obtain a homopolymer of a tetra-acetylene derivative bearing a tetrahedral structure, in other words, a new three-dimensional crosslinked polymer bearing the structure, to prepare its thin film and to provide a method for forming the same, and to obtain a new low dielectric...

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Hauptverfasser:	KATO TAKASHI, SATAKE HIDEJI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMISTRY COMPOSITIONS BASED THEREON ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONSONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS METALLURGY ORGANIC MACROMOLECULAR COMPOUNDS SEMICONDUCTOR DEVICES THEIR PREPARATION OR CHEMICAL WORKING-UP
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To obtain a homopolymer of a tetra-acetylene derivative bearing a tetrahedral structure, in other words, a new three-dimensional crosslinked polymer bearing the structure, to prepare its thin film and to provide a method for forming the same, and to obtain a new low dielectric constant material having both of low dielectric constant and excellent mechanical strengths. SOLUTION: The polymer is a high molecular compound prepared by subjecting a compound represented by formula (1) (wherein X is a tetra valent organic group of 1 to 10 carbon atoms or a silicon atom; Y is independently H or a monovalent organic group of 1 to 10 carbon atoms; (n) is independently 0 or a positive integer) to three-dimensional crosslinking reaction. COPYRIGHT: (C)2005,JPO&NCIPI