X-RAY ANALYSIS DEVICE, X-RAY ANALYSIS METHOD AND SURFACE INSPECTION DEVICE

PROBLEM TO BE SOLVED: To miniaturize an X-ray analysis device capable of wide-range element analysis. SOLUTION: An X-ray tube 61 generates selectively three different X-rays. A spectroscopic element switching mechanism switches positions of doubly-curved spectroscopic elements 80a, 80b, 80c corresponding to the type of the X-ray generated from the X-ray tube 61. The crystal surface of the doubly-curved spectroscopic element is curved in a concave shape with a prescribed curvature R1 in the longitudinal direction, and the X-ray entering at a Bragg angle with a prescribed extension is Bragg-reflected by the crystal surface of the doubly-curved spectroscopic element and changed into a monochromatized X-ray. The crystal surface of the doubly-curved spectroscopic element is also curved in a concave shape with a prescribed curvature R2 in the lateral direction. The X-ray monochromatized by Bragg reflection by the crystal surface of the doubly-curved spectroscopic element is converged in a spot shape on the surface of a semiconductor wafer 1 by the curvature R1 and the curvature R2. COPYRIGHT: (C)2005,JPO&NCIPI