METHOD FOR MANUFACTURING SOLAR BATTERY ELEMENT
PROBLEM TO BE SOLVED: To provide a method for manufacturing a solar battery element decreasing a use amount of a chemical in a simpler method than the conventional. SOLUTION: The method for manufacturing the solar battery element having a diffusion layer 2 and an anti-reflection layer 3 on the surfa...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a method for manufacturing a solar battery element decreasing a use amount of a chemical in a simpler method than the conventional. SOLUTION: The method for manufacturing the solar battery element having a diffusion layer 2 and an anti-reflection layer 3 on the surface of a semiconductor substrate 1 removes a damage layer 11 by performing chemical treatment after forming on the semiconductor layer 1 the damage layer 11 penetrating the anti-reflection layer 3 by performing physical processing above the anti-reflection film 3. COPYRIGHT: (C)2005,JPO&NCIPI |
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