PLASMA CORROSION RESISTANT THERMAL SPRAYING MEMBER, AND ITS PRODUCTION METHOD

PROBLEM TO BE SOLVED: To provide a plasma corrosion resistant thermal spraying member reduced in the total gas discharge amount in a working temperature region, attaining a prescribed vacuum in a short time, exerting little influence on etching and a film deposition process, and capable of improving...

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Bibliographische Detailangaben
Hauptverfasser:	YOKOYAMA MASARU, KOBAYASHI YOSHIAKI, ICHIJIMA MASAHIKO
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a plasma corrosion resistant thermal spraying member reduced in the total gas discharge amount in a working temperature region, attaining a prescribed vacuum in a short time, exerting little influence on etching and a film deposition process, and capable of improving the yield of a device. SOLUTION: The plasma corrosion resistant thermal spraying member is obtained by depositing a yttria sprayed coating on a base material by a plasma spraying method. The total gas discharge amount in the temperature region from 50 to 240°C is ≤120 μl/cm2. COPYRIGHT: (C)2005,JPO&NCIPI