METHOD FOR BLENDING AND RECIRCULATING DEUTERIUM-CONTAINING GAS

PROBLEM TO BE SOLVED: To provide a method for blending a deuterium-containing mixtures used for optical fiber manufacturing, and recovering, purifying and recirculating these mixtures. SOLUTION: A deuterium-containing exhaust gas mixture from a process chamber 50, which may contains impurities, is s...

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Bibliographische Detailangaben
Hauptverfasser:	SHIRLEY ARTHUR I, HWANG SHUENNG
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUSENAMELS CHEMISTRY COMPOUNDS THEREOF GLASS INORGANIC CHEMISTRY JOINING GLASS TO GLASS OR OTHER MATERIALS MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES METALLURGY MINERAL OR SLAG WOOL NON-METALLIC ELEMENTS PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEPARATION SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS,MINERALS OR SLAGS SURFACE TREATMENT OF GLASS TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a method for blending a deuterium-containing mixtures used for optical fiber manufacturing, and recovering, purifying and recirculating these mixtures. SOLUTION: A deuterium-containing exhaust gas mixture from a process chamber 50, which may contains impurities, is sent through lines 51, 53, recovered by a pump 60, further sent to a purifying unit 70 through a line 60 to be purified. The purified gas is sent to a storage tank 80 through a line 72 and stored. The purified, deuterium-containing gas mixture is blended with a pure deuterium gas from a storage tank 10 in a line 82 and an inert gas from a storage tank 20, and recirculated. COPYRIGHT: (C)2005,JPO&NCIPI