CRUCIBLE FOR GROWING SINGLE CRYSTAL, AND ITS AFTER HEATER
PROBLEM TO BE SOLVED: To reduce wettability at the outer bottom surface of a crucible to prevent sticking of a melt liquid onto the outer bottom surface of the crucible, and to grow a high quality and high performance single crystal with high efficiency. SOLUTION: The crucible used for growing the s...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To reduce wettability at the outer bottom surface of a crucible to prevent sticking of a melt liquid onto the outer bottom surface of the crucible, and to grow a high quality and high performance single crystal with high efficiency. SOLUTION: The crucible used for growing the single crystal by a micro pulling-down method has such a shape that the diameter of the inner wall at the lower part of the crucible is made smaller toward the opening part of the inlet side of a fine hole, and the opening part of the outlet side of the fine hole is provided to a projected flat surface which is formed by horizontally projecting from the crucible bottom part and has a form nearly similar to the form of the lateral cross section in the the growth direction of the desired single crystal. The projected flat surface is formed to be a smooth flat surface having a surface roughness of ≤10 μm. Thereby, the sticking of the melt solution to the bottom surface of the crucible is suppressed, and single crystals having various shapes such as a square pillar-like, columnar or plate-like shape can be grown by a single process while uniformizing the distribution along the crystal growth direction of an added element. COPYRIGHT: (C)2005,JPO&NCIPI |
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