FIELD EMISSION TYPE ELECTRON GUN
PROBLEM TO BE SOLVED: To provide a field emission type electron gun free from complicated alignment work and possible to be miniaturized and simplified in structure. SOLUTION: A cathode 1 and an extractor 3 are unified to form a structure 6, and the structure 6 and an anode 4 are respectively provid...
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| Sprache: | eng |
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| Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a field emission type electron gun free from complicated alignment work and possible to be miniaturized and simplified in structure. SOLUTION: A cathode 1 and an extractor 3 are unified to form a structure 6, and the structure 6 and an anode 4 are respectively provided with fitting parts 19 and 21. Positioning of the structure 6 and the anode 4 is performed by a positioning member 17 formed with a first fitting part 18 and a second fitting part 20 having dimension considering a coefficient of thermal expansion so that these fitting parts can be fitted to the fitting parts 19 and 21 without generating looseness when operating. COPYRIGHT: (C)2005,JPO&NCIPI |
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