CONVEYING METHOD AND CONVEYING DEVICE

PROBLEM TO BE SOLVED: To provide a conveying method and a conveying device capable of conveying at a sufficient accuracy of position and preventing an excessive load from being applied to a substrate when the sheet-like or plate-like substrate is conveyed and particularly being preferably applied to conveying of laminated object laminated with a wiring plate, a prepreg or the like at manufacturing of a multi-layer wiring plate. SOLUTION: In the conveying device, clamp parts 2 mounted to a rail 1 provided in parallel respectively are constituted by a linear motion unit 3 traveling along the rail 1 and a clamp body 8 for clamping an end of a substrate 13. The clamp part for clamping one side end of the substrate 13 of the above clamp parts 2 clamps the substrate 13 in the state that the clamp body 8 is freely movable against the linear motion unit 3 in a direction perpendicular to a conveying direction of the substrate 13 during conveying of the substrate 13. The clamp for clamping the other end of the substrate 13 clamps the substrate 13 in the state that the clamp body 8 is not moved against the linear motion unit 3 in a direction perpendicular to the conveying direction of the substrate 13 during conveying of the substrate 13. COPYRIGHT: (C)2005,JPO&NCIPI