POLISHING DEVICE AND POLISHING METHOD

PROBLEM TO BE SOLVED: To manufacture a product having high dimensional accuracy in a short time without requiring skill of a high degree. SOLUTION: A reference body 14 is positioned and placed on a work table 4 of a device having the rotatingly driven work table 4 for positioning and placing a workpiece 2, a grinding wheel head 8 lifted to the work table 4, and provided with a grinding wheel 12 for polishing the workpiece 12 by being rotatingly driven, and a control board 13 for controlling polishing operation of the grinding wheel 12. In the reference body 14, a surface state is monitored by a detecting sensor 20, when polishing work of the workpiece 2 by the grinding wheel 12 advances. The detecting sensor 20 presents polishing of the workpiece 2 by the grinding wheel 12, by outputting a detecting signal to the control board 13, by detecting a state of polishing and grinding an identification coating film 16 arranged on a surface of the reference body 14 by the grinding wheel 12. COPYRIGHT: (C)2005,JPO&NCIPI