DIAPHRAGM TYPE VALVE
PROBLEM TO BE SOLVED: To prevent permeated substances from being released in the air when substances in a controlled gas are those capable of being permeated through a diaphragm and increase flow rate when a valve is opened in the diaphragm type valve controlling flow from a high-pressure side chamb...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To prevent permeated substances from being released in the air when substances in a controlled gas are those capable of being permeated through a diaphragm and increase flow rate when a valve is opened in the diaphragm type valve controlling flow from a high-pressure side chamber to a low-pressure side chamber. SOLUTION: In this valve, the high-pressure side chamber 3 and the low-pressure side chamber 9 are formed on one surface side of the diaphragm 4, and a back pressure chamber 6 is formed on the other surface side. The high-pressure side chamber is allowed to communicate with or cut out from the low-pressure side chamber 9 by a valve part 12 formed in the diaphragm 4. This valve comprises a pressure release hole 16 releasing a pressure in the back pressure chamber 6 to the low-pressure side chamber 9. COPYRIGHT: (C)2005,JPO&NCIPI |
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