DIAPHRAGM TYPE VALVE

PROBLEM TO BE SOLVED: To prevent permeated substances from being released in the air when substances in a controlled gas are those capable of being permeated through a diaphragm and increase flow rate when a valve is opened in the diaphragm type valve controlling flow from a high-pressure side chamb...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: INAGAKI KAORU, TASHIMO HIROKAZU
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To prevent permeated substances from being released in the air when substances in a controlled gas are those capable of being permeated through a diaphragm and increase flow rate when a valve is opened in the diaphragm type valve controlling flow from a high-pressure side chamber to a low-pressure side chamber. SOLUTION: In this valve, the high-pressure side chamber 3 and the low-pressure side chamber 9 are formed on one surface side of the diaphragm 4, and a back pressure chamber 6 is formed on the other surface side. The high-pressure side chamber is allowed to communicate with or cut out from the low-pressure side chamber 9 by a valve part 12 formed in the diaphragm 4. This valve comprises a pressure release hole 16 releasing a pressure in the back pressure chamber 6 to the low-pressure side chamber 9. COPYRIGHT: (C)2005,JPO&NCIPI