LAPPING DEVICE

PROBLEM TO BE SOLVED: To provide a lapping device, simplified in structure of the whole device, while preventing dislocation of lapping paper (p) to a lapping shoe 40. SOLUTION: A lapping paper lock means 60 is arranged in a tip part of a lapping arm 23, to respectively sandwich a lapping paper supp...

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1. Verfasser: KUDOU MATSUKIKU
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a lapping device, simplified in structure of the whole device, while preventing dislocation of lapping paper (p) to a lapping shoe 40. SOLUTION: A lapping paper lock means 60 is arranged in a tip part of a lapping arm 23, to respectively sandwich a lapping paper supply side part of unused lapping paper (pa) supplied to the lapping shoe 40 from a lapping paper supply means 11, and a lapping paper recovering side part of used lapping paper (pb) recovered to a lapping paper recovering means 12 from the lapping shoe 40, thereby restrains the movement of the lapping paper (p) to the lapping shoe 40, to prevent drag of the lapping paper (p), when pressed to a processing object surface (wa) of a rotatingly driven processing object member (w). COPYRIGHT: (C)2005,JPO&NCIPI