METAL POWDER, AND ITS PRODUCTION METHOD

PROBLEM TO BE SOLVED: To provide metal powder with a mean particle diameter of ≤0.1 μm in which delamination is less prone to occur when used in an internal electrode for a multilayer ceramics capacitor, and to provide its production method. SOLUTION: A vessel 22 filled with AlCl3powder 29 is arranged at an evaporation part 26, a vessel 23 filled with Ni powder 28 is arranged at a reaction part 27, and a nozzle 36 is inserted into the Ni powder 28. Next, while rotating a reaction tube 27 by a rotary motor 30, the evaporation part 26 is heated to 100°C by an electric furnace 25a, and the reaction part 27 is heated to 200 to 600°C by an electric furnace 25b. Then, gaseous Ar-H2-HCl freed of impurity oxygen in the gas by an oxygen pump (not shown in figure) is fed from a nozzle 32, and further, exhaust gas is exhausted from a nozzle 33. This state is held for 30 min, the gas (AlCl3)2generated in the evaporation part 26 is contacted with the Ni powder, and Al is allowed to enter into solid solution in the surface of the Ni powder. COPYRIGHT: (C)2005,JPO&NCIPI