THIN FILM PIEZOELECTRIC ELEMENT, ITS MANUFACTURING METHOD AND ACTUATOR
PROBLEM TO BE SOLVED: To provide thin film piezoelectric elements constituted as a pair by a simple manufacturing process, its manufacturing method, and an actuator using the elements. SOLUTION: A first piezoelectric thin film 52 held by a first main electrode film 50 and a first counter electrode f...
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| creator | KUWAJIMA HIDEKI UCHIYAMA HIROICHI |
| description | PROBLEM TO BE SOLVED: To provide thin film piezoelectric elements constituted as a pair by a simple manufacturing process, its manufacturing method, and an actuator using the elements. SOLUTION: A first piezoelectric thin film 52 held by a first main electrode film 50 and a first counter electrode film 56 and a second piezoelectric thin film 66 held by a second main electrode film 62 and a second counter electrode film 68 are adhered. A part of each of the first main electrode film 50 and the second main electrode film 62 constitutes separate electrode parts 60 and 72 separated in island shapes. In the separate electrode parts 60 and 72 of the first main electrode film 50 and the second main electrode film 62, the separate electrode part 60 of the first main electrode film 50 and the first counter electrode 56, and the separate electrode part 72 of the second main electrode film 62 and the second counter electrode film 68 are electrically connected, respectively, via viaholes 58 and 70. The separate electrode part 60 and the first main electrode film 50 have extended parts 50a and 60a having shapes projected more than a first piezoelectric thin film 52, respectively. The extended parts 50a and 60a are arranged as a pair on the same plane by being separated by a prescribed distance. COPYRIGHT: (C)2005,JPO&NCIPI |
| format | Patent |
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SOLUTION: A first piezoelectric thin film 52 held by a first main electrode film 50 and a first counter electrode film 56 and a second piezoelectric thin film 66 held by a second main electrode film 62 and a second counter electrode film 68 are adhered. A part of each of the first main electrode film 50 and the second main electrode film 62 constitutes separate electrode parts 60 and 72 separated in island shapes. In the separate electrode parts 60 and 72 of the first main electrode film 50 and the second main electrode film 62, the separate electrode part 60 of the first main electrode film 50 and the first counter electrode 56, and the separate electrode part 72 of the second main electrode film 62 and the second counter electrode film 68 are electrically connected, respectively, via viaholes 58 and 70. The separate electrode part 60 and the first main electrode film 50 have extended parts 50a and 60a having shapes projected more than a first piezoelectric thin film 52, respectively. The extended parts 50a and 60a are arranged as a pair on the same plane by being separated by a prescribed distance. 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SOLUTION: A first piezoelectric thin film 52 held by a first main electrode film 50 and a first counter electrode film 56 and a second piezoelectric thin film 66 held by a second main electrode film 62 and a second counter electrode film 68 are adhered. A part of each of the first main electrode film 50 and the second main electrode film 62 constitutes separate electrode parts 60 and 72 separated in island shapes. In the separate electrode parts 60 and 72 of the first main electrode film 50 and the second main electrode film 62, the separate electrode part 60 of the first main electrode film 50 and the first counter electrode 56, and the separate electrode part 72 of the second main electrode film 62 and the second counter electrode film 68 are electrically connected, respectively, via viaholes 58 and 70. The separate electrode part 60 and the first main electrode film 50 have extended parts 50a and 60a having shapes projected more than a first piezoelectric thin film 52, respectively. The extended parts 50a and 60a are arranged as a pair on the same plane by being separated by a prescribed distance. 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SOLUTION: A first piezoelectric thin film 52 held by a first main electrode film 50 and a first counter electrode film 56 and a second piezoelectric thin film 66 held by a second main electrode film 62 and a second counter electrode film 68 are adhered. A part of each of the first main electrode film 50 and the second main electrode film 62 constitutes separate electrode parts 60 and 72 separated in island shapes. In the separate electrode parts 60 and 72 of the first main electrode film 50 and the second main electrode film 62, the separate electrode part 60 of the first main electrode film 50 and the first counter electrode 56, and the separate electrode part 72 of the second main electrode film 62 and the second counter electrode film 68 are electrically connected, respectively, via viaholes 58 and 70. The separate electrode part 60 and the first main electrode film 50 have extended parts 50a and 60a having shapes projected more than a first piezoelectric thin film 52, respectively. The extended parts 50a and 60a are arranged as a pair on the same plane by being separated by a prescribed distance. COPYRIGHT: (C)2005,JPO&NCIPI</abstract><edition>7</edition><oa>free_for_read</oa></addata></record> |
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| subjects | CONVERSION OR DISTRIBUTION OF ELECTRIC POWER ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERATION INFORMATION STORAGE INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TRANSPORTING |
| title | THIN FILM PIEZOELECTRIC ELEMENT, ITS MANUFACTURING METHOD AND ACTUATOR |
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