THIN FILM PIEZOELECTRIC ELEMENT, ITS MANUFACTURING METHOD AND ACTUATOR

PROBLEM TO BE SOLVED: To provide thin film piezoelectric elements constituted as a pair by a simple manufacturing process, its manufacturing method, and an actuator using the elements. SOLUTION: A first piezoelectric thin film 52 held by a first main electrode film 50 and a first counter electrode film 56 and a second piezoelectric thin film 66 held by a second main electrode film 62 and a second counter electrode film 68 are adhered. A part of each of the first main electrode film 50 and the second main electrode film 62 constitutes separate electrode parts 60 and 72 separated in island shapes. In the separate electrode parts 60 and 72 of the first main electrode film 50 and the second main electrode film 62, the separate electrode part 60 of the first main electrode film 50 and the first counter electrode 56, and the separate electrode part 72 of the second main electrode film 62 and the second counter electrode film 68 are electrically connected, respectively, via viaholes 58 and 70. The separate electrode part 60 and the first main electrode film 50 have extended parts 50a and 60a having shapes projected more than a first piezoelectric thin film 52, respectively. The extended parts 50a and 60a are arranged as a pair on the same plane by being separated by a prescribed distance. COPYRIGHT: (C)2005,JPO&NCIPI