METHOD AND APPARATUS FOR TESTING SEMICONDUCTOR DEVICE

METHOD AND APPARATUS FOR TESTING SEMICONDUCTOR DEVICE

PROBLEM TO BE SOLVED: To provide a method and apparatus for testing semiconductor devices which can more efficiently and accurately suppress the effluence of defective products. SOLUTION: The method of testing semiconductor devices includes a process of conducting a defective inspection on a semicon...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: KUNIHIRO TAKASHI
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To provide a method and apparatus for testing semiconductor devices which can more efficiently and accurately suppress the effluence of defective products. SOLUTION: The method of testing semiconductor devices includes a process of conducting a defective inspection on a semiconductor wafer having chips wherein a plurality of semiconductor elements will be incorporated, to detect chips having defects in outer appearance, a process of arithmetically processing information on the detected chips, and a process of testing chips or a semiconductor device formed from chips for electric characteristics and/or reliability based on the arithmetically processed information to determine whether they are acceptable or non-acceptable. COPYRIGHT: (C)2005,JPO&NCIPI