CONDENSER LENS SYSTEM, LASER BEAM MACHINING DEVICE, AND METHOD FOR ADJUSTING CONDENSER LENS

PROBLEM TO BE SOLVED: To provide a condenser lens system which is used for a laser beam machining device for performing laser beam scanning through a beam scanning mechanism, which can be assembled stably with high accuracy and which makes it possible to use lenses being aspherical in the entire surface and completely made of germanium. SOLUTION: In the condenser lens system consisting of a plurality of lenses, the axial adjustment of the lenses is performed in a manner that the beam intensity distribution becomes symmetrical in the vertical and horizontal regions with respect to the center of a scannable area by using a lens holder 15 equipped with a mechanism that can move a second lens 12 in parallel in a two-dimensional direction orthogonally crossing the optical axis and fix the lens. In addition, the interval adjustment and rotary angle adjustment of the lenses are performed by using a lens holder equipped with: a lens interval adjusting mechanism 19 that can move the lens in parallel in the optical axis direction and fix the lens; and a mechanism that can rotate the lens with the optical axis as a rotary axis. Thus, more constant machining quality can be obtained in the entire scannable area. COPYRIGHT: (C)2005,JPO&NCIPI