METHOD FOR MANUFACTURING TITANIUM DIOXIDE FILM COMPRISING CRYSTAL-ORIENTED CRYSTALLITES

PROBLEM TO BE SOLVED: To provide a method for manufacturing a titanium dioxide film comprising crystallites, in which the crystal growth orientation is uniform, on an amorphous substrate such a glass substrate by a laser vapor deposition method. SOLUTION: A film comprising crystallites of zinc oxide...

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Bibliographische Detailangaben
Hauptverfasser:	YAMAMOTO HARUYA, SAI EIKI
Format:	Patent
Sprache:	eng
Schlagworte:	AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE APPARATUS THEREFOR CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUSENAMELS CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSESC01D OR C01F CRYSTAL GROWTH DIFFUSION TREATMENT OF METALLIC MATERIAL GLASS INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL INORGANIC CHEMISTRY JOINING GLASS TO GLASS OR OTHER MATERIALS METALLURGY MINERAL OR SLAG WOOL PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE REFINING BY ZONE-MELTING OF MATERIAL SEPARATION SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE SINGLE-CRYSTAL-GROWTH SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS,MINERALS OR SLAGS SURFACE TREATMENT OF GLASS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION THEIR RELEVANT APPARATUS TRANSPORTING UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a method for manufacturing a titanium dioxide film comprising crystallites, in which the crystal growth orientation is uniform, on an amorphous substrate such a glass substrate by a laser vapor deposition method. SOLUTION: A film comprising crystallites of zinc oxide (ZnO) having particle sizes of several nanometer to several tens of nanometer and crystal oriented to (0001) plane is deposited on the amorphous substrate such as glass (SiO2) substrate by the laser vapor deposition method using an oxygen atmosphere, and then a film comprising crystallites of crystal-oriented anatase-type titanium dioxide of (001) plane and crystal-oriented rutile-type titanium dioxide of (100) plane is deposited on the film. COPYRIGHT: (C)2005,JPO&NCIPI