MICROVALVE AND ITS MANUFACTURING METHOD

PROBLEM TO BE SOLVED: To provide a microvalve having an integrated structure of a valve whose wall face keeps a spherical shape and which has the minimum leak, and a flow path, and also to provide its manufacturing method. SOLUTION: The micro valve is composed by connecting the valve to the flow pat...

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Bibliographische Detailangaben
Hauptverfasser:	SHOJI SHUICHI, KO TEISO, SHINOHARA ETSUO
Format:	Patent
Sprache:	eng
Schlagworte:	ACTUATING-FLOATS BLASTING COCKS DEVICES FOR VENTING OR AERATING ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING LIGHTING MECHANICAL ENGINEERING MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TAPS THERMAL INSULATION IN GENERAL TRANSPORTING VALVES WEAPONS
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a microvalve having an integrated structure of a valve whose wall face keeps a spherical shape and which has the minimum leak, and a flow path, and also to provide its manufacturing method. SOLUTION: The micro valve is composed by connecting the valve to the flow path composed of a groove structure 8 formed in a support member and a silicone elastomer thin film 10 arranged so as to cover the open end part of the groove structure 8. When the microvalve, in which the wall face shape of the valve opposing to the silicone elastomer thin film 10 is formed into the spherical shape 7, is manufactured, a high viscous photo-curable resin film 2 is formed on a substrate 1. A crimping substrate 3, to which a circular through-hole is formed, is laid on the photo-curable resin film 2. The surface of the photo-curable resin film 2, which is protruded from the circular through-hole by the self weight of the crimping substrate 3, is turned into a spherical shape by the surface tension. After that, it is hardened. A replica is manufactured by making the substrate 1, to which the spherical shape is formed, as a mold. Accordingly, the valve to be connected to the flow path is formed. COPYRIGHT: (C)2005,JPO&NCIPI