ASSEMBLY COMPRISING SENSOR FOR DETERMINING AT LEAST ONE OF TILT AND HEIGHT OF SUBSTRATE, METHOD THEREFOR, AND LITHOGRAPHIC PROJECTION APPARATUS

PROBLEM TO BE SOLVED: To provide an assembly comprising a sensor for determining at least one of tilt and height of a surface of a substrate in a lithographic projection apparatus. SOLUTION: The substrate (W;11) is movable along at least one path approximately parallel to the surface of the substrate with respect to the sensor. The lithographic projection apparatus (1) has an exposure scanning direction (y), and the assembly is arranged to continuously move the substrate relative to the sensor along at least the above one path and to provide measurement data about at least one of tilt and height along at least the above one path. The assembly comprises a memory (10) for storing the measurement data for use during a later exposure of the substrate by the lithographic projection apparatus. At least the above one path of the substrate is at least partly at an angle to the exposure scanning direction. COPYRIGHT: (C)2005,JPO&NCIPI