MANUFACTURING METHOD OF PHOSPHOR OR SCINTILLATOR SHEET AND PANEL SUITABLE FOR USING FOR SCANNING DEVICE
PROBLEM TO BE SOLVED: To improve the uniformity of sensitivity and resolution in a large area sheet and eliminate defects due to dust or stain generated in evaporating and cutting in desired dimensions in a method for manufacturing a plurality of sheets coating phosphor or scintillator in a sealed r...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To improve the uniformity of sensitivity and resolution in a large area sheet and eliminate defects due to dust or stain generated in evaporating and cutting in desired dimensions in a method for manufacturing a plurality of sheets coating phosphor or scintillator in a sealed region. SOLUTION: A vacuum chamber 1 contains at least two circular column carrier rollers 5 and 20 for carrying a flexible support 5 with more than 5 times of the dimension of a desired sheet, at least one crucible 3 including raw material mixture giving the composition of desired phosphor or scintillator and a layered unit. This manufacturing method includes processes of installing the support on the roller, evaporating the phosphor or scintillator having the desired composition on the support, layering the desired layer on the existing layer and cutting the layer into sheets with the desired dimensions. The layering process includes a process for covering the layer with a protection foil and the chamber is maintained at least under a vacuum condition during the evaporation process. COPYRIGHT: (C)2005,JPO&NCIPI |
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