DEVICE FOR ATTACHING AND DETACHING COVER OF ENCLOSURE

PROBLEM TO BE SOLVED: To enable a latch key to be advanced into a latch-key groove for opening the lid of FOUP, even for FOUP, where a latch body having the latch-key groove has not completely returned to the initial position. SOLUTION: In a cover attaching/detaching device 10 of an enclosure, a sealed vessel body 31 is integrated with the lid 32 by a latch with the rotation of the latch body 34, provided at the lid for sealing to approach a bolt plate 11; the latch key 14 enters the latch-key groove 36 of the latch body for releasing the engagement between the sealed vessel body 31 and the latch 35 by the rotation of the latch key 14 to detach the lid from the sealed vessel body. A sensor 19 detects that the latch key approaches the latch-key groove, when the sealed container approaches the bolts plate. Based on the detection, a latch opening and closing device 15 starts the rotation of the latch key 14. COPYRIGHT: (C)2005,JPO&NCIPI