LAPPING APPARATUS

PROBLEM TO BE SOLVED: To provide a lapping apparatus which is provided to be movable and enables a turntable to be placed in a lower position than in a conventional one. SOLUTION: A rotary driving mechanism 16 includes a rotary roller 32 provided outward from a turntable 14 so that an outer peripheral surface 32a is opposite to and separate from an outer peripheral surface 14b of the turntable 14 and driven to rotate by a driving source 40 and an intermediate roller 34 formed in such a size that its outer peripheral surface 34b is in contact with the outer peripheral surface 14b of the turntable 14 and the outer peripheral surface 32a of the roller 32. The mechanism includes a support 48 for supporting the intermediate roller 34 movably in the direction of coming into contact with/farther away from the outer peripheral surface 14b of the turntable 14 and the outer peripheral surface 32a of the roller 32, and an urging means 50 for urging the roller 34 in the direction of coming into contact with the turntable 14 and the rotary roller 32. COPYRIGHT: (C)2005,JPO&NCIPI