DRY FLUIDIZED POLISHING METHOD

PROBLEM TO BE SOLVED: To provide a dry fluidized polishing method for improving polishing performance without increasing a rotational peripheral speed even in a conventional device scale. SOLUTION: This dry fluidized polishing method polishes a work by rubbing the polishing work and polishing media,...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TSUCHIIE KAZUYO, SUZUKI SHOICHIRO, ARITA SATORU, FUKUI YOICHI
Format:	Patent
Sprache:	eng
Schlagworte:	DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING TRANSPORTING
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