SUBSTRATE INSPECTION APPARATUS

PROBLEM TO BE SOLVED: To reliably prevent breakage of a probe and an apparatus itself as well as secure reliability in measurement results and workability. SOLUTION: This substrate inspection apparatus is provided with both a substrate fixing mechanism 12 for generating a relative pressing force and fixing the location of a substrate to be inspected P between a substrate mounting part 13 for mounting the substrate to be inspected P and a substrate contact part 14 to be in contact with the upper circumferential edge part of the substrate to be inspected P and a one-side inspection mechanism 22. In the one-side inspection mechanism 22, an elevating and lowering base 23 having a plurality of probes 25 to be freely in contact with the side of the lower surface P1of the substrate to be inspected P is arranged. The substrate mounting part 13 and the elevating and lowering base 23 each comprise opposed contact surfaces 42 and 52 to be in contact with each other when probes 35 come into contact with the lower surface P1under a prescribed contact pressure. The elevating and lowering base 23 is freely controlled to halt when an energizing circuit 43 is closed via the energizing circuit 43 to be closed when the opposed contact surfaces 42 and 52 are in contact with each other. COPYRIGHT: (C)2005,JPO&NCIPI